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MEMS and Microsystems: design, manufacture,and nanoscale engineering

Tai, Ran - Hsu

MEMS and Microsystems: design, manufacture,and nanoscale engineering - 2nd - New Jersey: John wiley & Sons ,2008. - xxiii,1018p. N.A Photocopy

Includes Index

ISBN: 9780470083017

Subjects--Personal Names:
Electronic Engineering

Subjects--Topical Terms:
Technology

Dewey Class. No.: 621.381 HUS

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MEMS and Microsystems: design, manufacture,and nanoscale engineering