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Nano-and Micro-Electronmechanical Systems: fundamentals of nano and microengineering

By: Material type: TextTextPublication details: Boca Raton: CRS Press ,2005.Edition: 2ndDescription: viii,612p. N.A OriginalISBN:
  • 849328381
Subject(s): DDC classification:
  • 621.381 LYS
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