@book{10599,
	author = {Lyshevski ,Sergey Edward},
	title = {Nano-and Micro-Electronmechanical Systems: fundamentals of nano and microengineering},
	publisher = {CRS Press},
	year = {,2005.},
	address = {Boca Raton:},
	edition = {2nd},
	note = {Includes Index}
}