Lyshevski ,Sergey Edward <br/><br/>
Nano-and Micro-Electronmechanical Systems: fundamentals of nano and microengineering 

 - 2nd 
 - Boca Raton:  CRS Press  ,2005. 
 - viii,612p.  N.A  Original 
<br/><br/> Includes Index 
<br/><br/><label>ISBN: </label>849328381 
<br/><br/><label>Subjects--Personal Names: </label><br/>Electronic Engineering
<br/><br/><label>Subjects--Topical Terms: </label><br/>Technology
<br/><br/><label>Dewey Class. No.: </label>621.381 LYS