TY  - BOOK
AU  - Lyshevski ,Sergey Edward
TI  - Nano-and Micro-Electronmechanical Systems: fundamentals of nano and microengineering
SN  - 849328381
U1  - 621.381 LYS 
PY  - 2005///
CY  - Boca Raton
PB  - CRS Press
KW  - Electronic Engineering
KW  - Technology
N1  - Includes Index
ER  -