TY  - BOOK
AU  - Tai, Ran  - Hsu
TI  - MEMS and Microsystems: design, manufacture,and nanoscale engineering
SN  - 9780470083017
U1  - 621.381 HUS 
PY  - 2008///
CY  - New Jersey
PB  - John wiley  & Sons
KW  - Electronic Engineering
KW  - Technology
N1  - Includes Index
ER  -