TY  - BOOK
AU  - Chang  , C .Y.
TI  - ULSI Technology
SN  - 71141057
U1  - 621.395 CHA 
PY  - 1996///
CY  - New York
PB  - McGraw-Hill
KW  - Electronic Engineering
KW  - Technology
N1  - Includes Index
ER  -