TY  - BOOK
AU  - Sze, S. M.
TI  - VLSI Technology 
SN  - 71003479
U1  - 621.395 SZE 
PY  - 1988///
CY  - New York
PB  - Mc Graw HIll
KW  - Electronic Engineering
KW  - Technology
N1  - Includes Index
ER  -