| 000 | 00529nam a2200181Ia 4500 | ||
|---|---|---|---|
| 008 | 240925s9999 xx 000 0 und d | ||
| 020 | _a849328381 | ||
| 082 | _a621.381 LYS | ||
| 100 | _aLyshevski ,Sergey Edward | ||
| 245 | 0 | _aNano-and Micro-Electronmechanical Systems: fundamentals of nano and microengineering | |
| 250 | _a2nd | ||
| 260 |
_aBoca Raton: _bCRS Press _c,2005. |
||
| 300 |
_aviii,612p. _bN.A _fOriginal |
||
| 500 | _aIncludes Index | ||
| 600 | _aElectronic Engineering | ||
| 650 | _aTechnology | ||
| 942 | _cBK | ||
| 999 |
_c10599 _d10599 |
||