000			00520nam a2200181Ia 4500
008			240925s9999 xx 000 0 und d
020			_a9780470083017
082			_a621.381 HUS
100			_aTai, Ran - Hsu
245		0	_aMEMS and Microsystems: design, manufacture,and nanoscale engineering
250			_a2nd
260			_aNew Jersey: _bJohn wiley & Sons _c,2008.
300			_axxiii,1018p. _bN.A _fPhotocopy
500			_aIncludes Index
600			_aElectronic Engineering
650			_aTechnology
942			_cBK
999			_c10600 _d10600