000 00467nam a2200181Ia 4500
008 240925s9999 xx 000 0 und d
020 _a9783540253778
082 _a620.5 MAH
100 _aNot - Available
245 0 _aMicromanufacturing and Nanotechnology
250 _aNA
260 _aNew York:
_bSpringer
_c,2006.
300 _a875p.
_bN.A
_fPhotocopy
500 _aIncludes Index
600 _aElectrical Engineering
650 _aTechnology
942 _cBK
999 _c10601
_d10601